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Freescale Semiconductor |
Freescale Semiconductor
+ 100 kPa On-Chip Temperature
Compensated and Calibrated
Silicon Pressure Sensors
The MPX2100 series devices silicon piezoresistive pressure sensors
providing a highly accurate and linear voltage output directly proportional to
the applied pressure. The sensor is a single, monolithic silicon diaphragm
with the strain gauge and a thin-film resistor network integrated on-chip.
The chip is laser trimmed for precise span and offset calibration an
temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C
• Available in Absolute, Differential and Gauge Configurations
• Easy to Use Chip Carrier Package Options
• Ratiometric to Supply Voltage
• ±0.25% Linearity (MPX2100D Series)
Pressure
MPX2100
Rev 10, 10/2008
MPX2100
Series
0 to 100 kPa (0 to 14.5 psi)
40 mV Full Scale Span
(Typical)
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
Device Name
Package
Options
Case
No.
Unibody Package (MPX2100 Series)
MPX2100A
Tray
344
MPX2100D
Tray
344
MPX2100AP
Tray
344B
MPX2100GP
Tray
344B
MPX2100DP
Tray
344C
MPX2100GVP
Tray
344D
MPX2100ASX
Tray
344F
ORDERING INFORMATION
# of Ports
Pressure Type
None Single
Dual
Gauge Differential Absolute
Device
Marking
•
•
•
•
•
•
•
•
•
•
•
• MPX2100A
MPX2100D
• MPX2100AP
MPX2100GP
MPX2100DP
MPX2100GVP
• MPX2100A
PACKAGES
MPX2100A/D
CASE 344-15
MPX2100AP/GP
CASE 344B-01
MPX2100DP
CASE 344C-01
MPX2100GVP
CASE 344D-01
MPX2100ASX
CASE 344F-01
© Freescale Semiconductor, Inc., 2002, 2008. All rights reserved.
Pressure
Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS
3
Sensing
Element
Thin Film
Temperature
Compensation
and Calibration
Circuitry
2 +VOUT
4 -VOUT
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
Voltage Output versus Applied Differential Pressure
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
The absolute sensor has a built-in reference vacuum. The
output voltage will decrease as vacuum, relative to ambient,
is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side (P1) relative to the vacuum side (P2). Similarly, output
voltage increases as increasing vacuum is applied to the
vacuum side (P2) relative to the pressure side (P1).
MPX2100
2
Sensors
Freescale Semiconductor
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