MS-2610 반도체 회로 부품 판매점
O3 Gas Sensor
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 MicroChemical Systems |
MS– 2610
O3 Gas Sensor
This datasheet describes the use of the MS-2610 in ozone detection applications. The package and the
mode of operation described in this document target the detection of the oxidizing gas O3 in indoor or
outdoor environments. Ozone is a hazardous gas, which can cause respiratory problems at
concentrations above 100 ppb.
Features:
• Low heater current
• Wide detection range
• High sensitivity
• Fast thermal response
• Electro-Static Discharge protected
• Miniature dimensions
• High resistance to shocks and vibrations
This Preliminary Data Sheet accompanies MicroChemical Systems MS-2610 sensors for O 3 gas. Reproduction and distribution of this document is
restricted by MicroChemical Systems. The following specifications are subject to change to accommodate continuous improvement.
Sensor Characteristics
Important Precautions:
Please read the following instructions carefully before using the MS-2610 sensor described in this
document to avoid erroneous readings and to prevent the device from permanent damage.
• Tin oxide (SnO2) gas sensors require a relatively long warm up period before correct O3 measurements can be taken. It is
important to follow the limits in the specifications (see Table 1) and to keep the sensor in the recommended powered operating
mode until the signal reaches a stable level. After exposing the sensor to high concentrations of O3, make sure the sensor is
given enough time to recover before taking new measurements.
• The sensor must not be wave-soldered without protection or exposed to high concentrations of organic solvents or corrosive
gases in order to avoid poisoning the sensitive layer. Use humidified gas for testing and calibration.
• Heater voltages above the specified maximum rating of 2.5 V will destroy the sensor. An increase of 0.5 V at 2.35 V causes an
increase of the heater temperature of about 100°C. The correct operating temperature is obtained by applying a heater voltage
of 2.35 ± 0.05 V.
• We strongly recommend using the operating mode and measurement circuit described in this document and referring to the
heater voltage in the “Electric Specifications” section. Deviating from these procedures may produce varying results or damage
the sensor.
• For any additional questions, please contact us at:
Operating Mode:
The recommended mode of operation is a constant voltage
mode. A heater voltage of VH = 2.35 V is applied. This
causes the temperature of the sensing resistor (RS) to
reach about 430°C.
Detection of the O3 concentration is achieved by
measuring the sensing resistor RS during operation.
Sensor Response:
The sensor response to O3 in air is represented in Figure
1. The sensor resistance RS is normalized to the
resistance under 100 ppb of O3 (R100ppb).
10
1
0.1
0.01
10
100
O3 [ppb]
1000
Figure 1: RS / R100ppb as a function of gas concentration
at 50% RH and 25°C.
Measurement Circuit:
Figure 2 shows the pin connections of the MS-2610
ozone sensor. A simple circuit to measure the O3
concentration is proposed in Figure 3. The heating voltage
VH is applied to pins 3 and 1. A load resistor RL is
connected in series with RS to convert the resistance RS to
a voltage VS between pins 2 and 4. RS can then be
calculated by the following expression:
RS = RL /(VCC - VS) ⋅ VS
32
Pin Number
1 Heater Ground
RH RS 2 Sensor Pin
41
3 Heater Power
4 Sensor Pin
Figure 2: Equivalent circuit (top view) of MS 2610.
Gas
VCC
Sensor
32
VH 4 1
RL
VS
GND
Figure 3: Measurement circuit for O3 detection.
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MS-2610 sensor
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