MPXHZ6400A 반도체 회로 부품 판매점
Media Resistant and High Temperature Accuracy Intergrated Silicon Pressure Sensor
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 Freescale Semiconductor |
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Freescale Semiconductor
Technical Data
Media Resistant and
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The Freescale MPXHZ6400A series sensor integrates on-chip, bipolar op
amp circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the Freescale pressure sensor a logical and economical choice
for the system designer.
The MPXHZ6400A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on a
pressure sensor chip.
Features
• Improved Accuracy at High Temperature
• Available in Small and Super Small Outline Packages
• 1.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Temperature Compensated from –40° to +125°C
• Durable Thermoplastic (PPS) Surface Mount Package
Typical Applications
• Industrial Controls
• Engine Control/Liquified Petroleum Gas (LPG)
ORDERING INFORMATION
Device
Type
Options
Case
No.
MPX Series
Order No.
Packing
Options
Device
Marking
Ported Absolute, Axial 1317A MPXHZ6400AC6T1 Tape & Reel MPXHZ6400A
Element Port
MPXHZ6400A
Rev 0, 08/2005
MPXHZ6400A
INTEGRATED
PRESSURE SENSOR
20 TO 400 kPA (3.0 TO 58 psi)
0.2 TO 4.8 V OUTPUT
(3.0 TO 58 psi)
SUPER SMALL OUTLINE PACKAGE
MPXHZ6400AC6T1
CASE 1317A-03
PIN NUMBERS(1)
1 N/C 5 N/C
2 VS 6
3 GND 7
N/C
N/C
4 VOUT 8
N/C
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
© Freescale Semiconductor, Inc., 2005. All rights reserved.
VS
Sensing
Element
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and
Ground
Reference
Shift Circuitry
Vout
GND Pins 1, 5, 6, 7, and 8 are NO CONNECTS
for small outline package devices
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 1. Maximum Ratings(1)
Rating
Symbol
Value
Maximum Pressure
PMAX
1600
Storage Temperature
TSTG
–40° to +125°
Operating Temperature
Output Source Current @ Full Scale Output(2)
Output Sink Current @ Minimum Pressure Offset2
TA –40° to +125°
Io+ 0.5
Io– –0.5
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Maximum Output Current is controlled by effective impedance from Vout to GND or Vout to VS in the application circuit.
Unit
kPa
°C
°C
mAdc
mAdc
MPXHZ6400A
2
Sensors
Freescale Semiconductor
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MPXHZ6400A sensor
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국내 전력반도체 판매점
상호 : 아이지 인터내셔날
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MPXHZ6400A
Media Resistant and High Temperature Accuracy Intergrated Silicon Pressure Sensor - Freescale Semiconductor
