SCA103T 반도체 회로 부품 판매점
DIFFERENTIAL INCLINOMETER
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 Murata |
Data Sheet
SCA103T Series
THE SCA103T DIFFERENTIAL INCLINOMETER SERIES
The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement
principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low
noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy
leveling instruments. The Murata inclinometers are insensitive to vibration due to having over damped sensing
elements plus they can withstand mechanical shocks of 20000 g.
Features
Measuring ranges ±15° SCA103T-D04 and
± 30° SCA103T-D05
0.001° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
Excellent stability over temperature and time
Common mode error and noise reduction
using the differential measurement principle
Single +5 V supply
Applications
Platform leveling and stabilization
Rotating laser levels
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o Continuous sensing element interconnection
failure check.
o Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Leveling instruments
Construction levels
12 VDD
S ens i ng
element 1
Signal conditioning
and filtering
10 ST_1
9 ST_2
Self test 1
Self test 2
E E P RO M
calibration
memory
Temperature
Sensor
S ens i ng
element 2
Signal conditioning
and filtering
A/D conversion
SPI interface
11 OUT_1
1 SCK
3 MISO
4 MOSI
7 CSB
5 OUT_2
Figure 1.
Functional block diagram
6 GND
Murata Electronics Oy
www.muratamems.fi
Subject to changes
Doc.Nr. 8261700
1/17
Rev.A3
Free Datasheet http://www.datasheet4u.com/
SCA103T Series
TABLE OF CONTENTS
The SCA103T Differential Inclinometer Series .......................................................................1
Features............................................................................................................................................. 1
Applications ...................................................................................................................................... 1
Table of Contents......................................................................................................................2
1 Electrical Specifications .....................................................................................................3
1.1 Absolute Maximum Ratings ................................................................................................... 3
1.2 Performance Characteristics.................................................................................................. 3
1.3 Electrical Characteristics ....................................................................................................... 4
1.4 SPI Interface DC Characteristics............................................................................................ 4
1.5 SPI Interface AC Characteristics............................................................................................ 4
1.6 SPI Interface Timing Specifications....................................................................................... 5
1.7 Electrical Connection.............................................................................................................. 6
1.8 Typical Performance Characteristics .................................................................................... 6
1.8.1 Additional External Compensation ...................................................................................... 7
2 Functional Description .......................................................................................................8
2.1 Differential Measurement ....................................................................................................... 8
2.2 Voltage to Angle Conversion ................................................................................................. 9
2.3 Ratiometric Output................................................................................................................ 10
2.4 SPI Serial Interface................................................................................................................ 10
2.5 Digital Output to Angle Conversion..................................................................................... 12
2.6 Self Test and Failure Detection Modes ................................................................................ 13
2.7 Temperature Measurement .................................................................................................. 14
3 Application Information ....................................................................................................15
3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15
3.2 Recommended Printed Circuit Board Footprint ................................................................. 16
4 Mechanical Specifications and Reflow Soldering ..........................................................16
4.1 Mechanical Specifications (Reference only) ....................................................................... 16
4.2 Reflow Soldering................................................................................................................... 17
Murata Electronics Oy
www.muratamems.fi
Subject to changes
Doc.Nr. 8261700
2/17
Rev.A3
Free Datasheet http://www.datasheet4u.com/
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PDF 파일 내의 페이지 : 총 17 페이지
제조업체: Murata
( murata )
SCA103T data
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국내 전력반도체 판매점
상호 : 아이지 인터내셔날
전화번호 : 051-319-2877
[ 홈페이지 ]
IGBT, TR 모듈, SCR, 다이오드모듈, 각종 전력 휴즈
( IYXS, Powerex, Toshiba, Fuji, Bussmann, Eaton )
전력반도체 문의 : 010-3582-2743
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