XLFV-100
SMC
XLF/XLFV Series High Vacuum Angle ValveAluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48
XLFV-16
XLF/XLFV Series High Vacuum Angle ValveAluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
SMC
PDF
XLFV-160
XLF/XLFV Series High Vacuum Angle ValveAluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
SMC
PDF